Trifluoromethane, CHF3 Electron Gas

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CAS NO	75-46-7
UN NO	1984
EINECS NO	200-872-4
Molecular weight	70.01
Appearance	Colorless, odorless
Melting point	-160 ℃
Boiling point	-84℃
Density	1.246
DOT Class	2.2
Label	Non-flammable Gas

Trifluoromethane is a colorless, odorless, non-flammable gas, is an organic compound, soluble in water, ethanol, acetone, insoluble in glycol and glycerol. Normal temperature is liquefied gas, chemical properties are not active substance.

Application

Electronic grade fluoroform is one of the plasma etching gases widely used in microelectronics industry, especially for the etching of silica film, which has the advantages of fast etching speed and good selectivity.

In addition, fluorine form is also used for low temperature mixing refrigerant, organic synthesis intermediate, infrared detector direct coolant.

Industrial Grade

Specification	99.9%
Moisture	≤ 2 ppm
Acidity (as HF)	≤0.1 mg/kg
Reside on evaporation	≤0.01 %
Foul gas in air phase	≤0.1 %
Carbon Dichloride	≤30 ppm

Other Grades and Purity Available on Asking

Specification	99.999%
Moisture	≤10 ppm
Acidity (as HF)	≤0.1 ppm
Nitrogen	≤4 ppm
Oxygen	≤1 ppm
Carbon Monoxide	≤0.5 ppm
Carbon Dioxide	≤0.5 ppm
Methane	≤0.5 ppm
Other Organics	≤ 1ppm