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Trifluoromethane, CHF3 Electron Gas

CAS NO  75-46-7
UN NO  1984
EINECS NO  200-872-4
Molecular weight  70.01
Appearance  Colorless, odorless
Melting point  -160 ℃
Boiling point  -84℃
Density  1.246
DOT Class  2.2
Label  Non-flammable Gas


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Trifluoromethane is a colorless, odorless, non-flammable gas, is an organic compound, soluble in water, ethanol, acetone, insoluble in glycol and glycerol. Normal temperature is liquefied gas, chemical properties are not active substance.


Electronic grade fluoroform is one of the plasma etching gases widely used in microelectronics industry, especially for the etching of silica film, which has the advantages of fast etching speed and good selectivity.

In addition, fluorine form is also used for low temperature mixing refrigerant, organic synthesis intermediate, infrared detector direct coolant.

Industrial Grade

Moisture≤ 2 ppm
Acidity (as HF)≤0.1 mg/kg
Reside on evaporation≤0.01 %
Foul gas in air phase≤0.1 %
Carbon Dichloride≤30 ppm
Other Grades and Purity Available on Asking
Moisture≤10 ppm
Acidity (as HF)≤0.1 ppm
Nitrogen≤4 ppm
Oxygen≤1 ppm
Carbon Monoxide≤0.5 ppm
Carbon Dioxide≤0.5 ppm
Methane≤0.5 ppm
Other Organics≤ 1ppm
Other Grades and Purity Available on Asking

Package Information

Cylinder CapacityValveWeight
40LXF-430 kgs
Other Packages Available on Asking