Carbon Tetrafluoride, CF4 Specialty Gas

CAS NO	75-73-0
UN NO	1982
EINECS NO	200-896-5
Molecular weight	88
Appearance	Colorless, Odorless
Melting point	-184 ℃
Boiling point	-128.1 ℃
Density	3.72 kg/m³
DOT Class	2.2
Label	Non-flammable Gas

》Send Mail《

Description

Tetrafluoromethane is a colorless, non-flammable gas. As a compressed gas at room temperature, CF4 is one of the most stable organic compounds. At 900℃, CF4 does not react with Cu, Ni, W, Mo, and only slowly decompose at carbon arc temperature. When burned with combustible gases, they decompose to produce toxic fluoride. In case of high heat, the pressure inside the container increases, there is a risk of cracking and explosion.

Application

Name: Carbon Tetrafluoride, CF4 Specialty Gas
SKU: 1050
Availability: InStock

Description for this block. Use this space for describing your block. Any text will do.

It is the most used plasma etching gas in microelectronics industry.

Carbon tetrafluoride high purity gas and the mixture of tetrafluoromethane high purity gas and high purity oxygen can be widely used in the etching of silicon, silicon dioxide, silicon nitride, phosphorus silicon glass and tungsten thin film materials.

It is also widely used in surface cleaning of electronic devices, solar cell production, laser technology, low temperature refrigeration, leak inspection, and stain remover in printed circuit production.

Industrial Grade

Specification	99.999%
Oxygen + Argon	≤ 1 ppm
Nitrogen	≤ 2 ppm
Hydrogen	≤ 0.3 ppm
Carbon Monoxide	≤ 0.3 ppm
Carbon Dioxide	≤ 0.3 ppm
Sulfur Hexafluoride	≤ 0.3 ppm
THC	≤ 0.3 ppm
Trifluoromethane	≤ 0.3 ppm
OFC	≤ 1 ppm
Moisture	≤ 1 ppm
Acidity as HF	≤ 0.1 ppm