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Nitrogen Trifluoride, NF3 Specialty Gas

CAS No.  7783-54-2
UN No.  2451
EINECS No.  232-007-1
Molecular weight  71.0019
Appearance  colourless, odourless
Melting point  -206.79℃
Boiling point  -129.0℃
Density  2.96kg/m3
DOT Class  2.2 & 5.1
Label  Non-flammable Gas, Oxidizing Agent
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Pure NF3 gas is a colorless and odorless gas. When mixed with a certain amount of impurity gas, the color becomes yellow, and there will be mildew or irritating odor. NF3 gas is not flammable, but can help to ignite. Nitrogen trifluoride slowly decomposes at temperatures above 350 ° C, producing strong oxidizing fluorine as it decomposes; therefore, it is a strong oxidizing agent at high temperatures.


Used in the plasma etching of silicon wafers.

Used in hydrogen fluoride and deuterium fluoride lasers, which are types of chemical lasers.

Industrial Grade

Carbon Tetrafluoride≤40 ppm
Nitrogen≤10 ppm
Oxygen+Argon≤5 ppm
Carbon Monoxide≤1 ppm
Carbon Dioxide≤3 ppm
Nitrous Oxide≤3 ppm
Sulfur Hexafluoride≤3 ppm
Moisture≤1 ppm
Express as HF≤1 ppm
Other Grades and Purity Available on Asking
Carbon Tetrafluoride≤20 ppm
Nitrogen≤5 ppm
Oxygen+Argon≤3 ppm
Carbon Monoxide≤1 ppm
Carbon Dioxide≤0.5 ppm
Nitrous Oxide≤1 ppm
Sulfur Hexafluoride≤2 ppm
Moisture≤1 ppm
Express as HF≤1 ppm
Other Grades and Purity Available on Asking

Package Information

Cylinder CapacityValveWeight
10LDISS6404 kgs
47LDISS64020 kgs
440LDISS640195 kgs
Other Packages Available on Asking